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SUN Dong. Numerical Simulation of Air Distribution in Long Grating Lithography Workshop[J]. Intelligent Building and Construction Machinery, 2020, 2(1): 52-54.
Citation: SUN Dong. Numerical Simulation of Air Distribution in Long Grating Lithography Workshop[J]. Intelligent Building and Construction Machinery, 2020, 2(1): 52-54.
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Numerical Simulation of Air Distribution in Long Grating Lithography Workshop

  • 1.College of Mechanical Engineering,Guizhou Institute of Technology, Guiyang Guizhou 550003;

  • 2.College of Mechanical Engineering,Guizhou Minzu University, Guiyang Guizhou 550025;

  • 3.College of Mechanical Engineering,Guizhou University, Guiyang Guizhou 550025

  • Received Date: 2019-12-21
  • Rev Recd Date: 2020-01-17
    • Available Online: 2022-03-28
  • Publish Date: 2020-01-28
    Abstract
  • The lithography process of long grating is a complex and precise manufacturing process, and good environmental conditions are conducive to improving product quality. In this paper, the air velocity field and temperature field formed by air conditioning and ventilation in a long grating lithography workshop are simulated and analyzed by CFD method, and the air conditioning parameters that meet the requirements of manufacturing process are determined.At the same time, the effects of air supply temperature and air supply speed on the airflow group of workshop are studied The effect of weaving can effectively reduce the cost and time of experiment and provide theoretical basis for actual production.

     

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