Design of Loadport Control System

In the process of semiconductor production, wafers need to be converted between clean and ultra clean environment. In order to ensure that wafers are not attached by particles, loadport (wafer loading port) is used as the input and output port of environment conversion. At present, loadport has been widely used in fab plant, but it still depends on import. Countries with loadport related technologies still have technical restrictions on China, so the research and development of key technologies of loadport is particularly important. In this paper, a loadport control system is designed and implemented, which can meet the application requirements of actual semiconductor production line